PRESENTATION

TFLN for CPO and Beyond

Co-packaged optics (CPO) is accelerating the demand for scalable, high-performance photonic integrated circuit (PIC) manufacturing technologies. In this presentation, we introduce SHINCRON’s INACO RF magnetron sputtering system, designed to enable large-area, uniform, and low-temperature epitaxial thin-film lithium niobate (TFLN) deposition for advanced PIC and CPO applications. INACO supports wafer-scale processing with precise control of film crystallinity, thickness, and optical properties, addressing key challenges in device performance, yield, and manufacturability. By engaging directly with leading CPO device makers and foundries, this talk aims to highlight INACO as a practical platform for joint development, PoC activities, and future volume production in next-generation optical engines.